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	Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser
	Liao, Yang1,2; Xu, Jian1,2; Sun, Haiyi1; Song, Juan1,2; Wang, Xinshun1,2; Cheng, Ya1
刊名	Applied surface science
	2008-08-30
卷号	254期号:21页码:7018-7021
关键词	Selective electroless plating Femtosecond pulsed laser Microelectrode Lithium niobate
ISSN号	0169-4332
DOI	10.1016/j.apsusc.2008.05.122
通讯作者	Cheng, ya(ycheng-45277@hotmail.com)
英文摘要	We present a novel technique to fabricate deeply embedded microelectrodes in linbo(3) using femtosecond pulsed laser ablation and selective electroless plating. the fabrication process mainly consists of four steps, which are (1) micromachining of microgrooves on the surface of linbo(3) by femtosecond laser ablation; (2) formation of agno(3) films on substrates; (3) scanning the femtosecond laser beam in the fabricated microgrooves for modi. cation of the inner surfaces; and (4) electroless copper plating. the void-free electroless copper plating is obtained with appropriate cross section of microgrooves and uniform initiation of the autocatalytic deposition on the inner surface of grooves. the dimension and shape of the microelectrodes could be accurately controlled by changing the conditions of femtosecond laser ablation, which in turn can control the distribution of electric field inside linbo(3) crystal for various applications, opening up a new approach to fabricate three-dimensional integrated electro-optic devices. (c) 2008 elsevier b. v. all rights reserved.
WOS关键词	OPTICAL SUPERLATTICE LINBO3 ; GLASS ; PULSES ; METALLIZATION ; DEPOSITION
WOS研究方向	Chemistry ; Materials Science ; Physics
WOS类目	Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
语种	英语
出版者	ELSEVIER SCIENCE BV
WOS记录号	WOS:000258997700059
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2388713
专题	中国科学院大学
通讯作者	Cheng, Ya
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Liao, Yang,Xu, Jian,Sun, Haiyi,et al. Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser[J]. Applied surface science,2008,254(21):7018-7021.
APA	Liao, Yang,Xu, Jian,Sun, Haiyi,Song, Juan,Wang, Xinshun,&Cheng, Ya.(2008).Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser.Applied surface science,254(21),7018-7021.
MLA	Liao, Yang,et al."Fabrication of microelectrodes deeply embedded in linbo(3) using a femtosecond laser".Applied surface science 254.21(2008):7018-7021.

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