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	Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses
	Xiao, Qi-Ling1,2; Xu, Cheng1,2; Shao, Shu-Ying1; Shao, Jian-Da1; Fan, Zheng-Xiu1
刊名	Vacuum
	2008-09-26
卷号	83期号:2页码:366-371
关键词	Ysz thin films Residual stress Electron-beam evaporation Refractive index Structural properties
ISSN号	0042-207X
DOI	10.1016/j.vacuum.2008.05.031
通讯作者	Xiao, qi-ling(xql324@126.com)
英文摘要	This paper describes the preparation and the characterization of y2o3 stabilized zro2 thin films produced by electric-beam evaporation method. the optical properties, microstructure, surface morphology and the residual stress of the deposited films were investigated by optical spectroscopy, x-ray diffraction (xrd), scanning probe microscope and optical interferometer. it is shown that the optical transmission spectra of all the ysz thin films are similar with those of zro2 thin film, possessing high transparency in the visible and near-infrared regions. the refractive index of the samples decreases with increasing of y2o3 content. the crystalline structure of pure zro2 films is a mixture of tetragonal phase and monoclinic phase, however, y2o3 stabilized zro2 thin films only exhibit the cubic phase independently of how much the added y2o3 content is. the surface morphology spectrum indicates that all thin films present a crystalline columnar texture with columnar grains perpendicular to the substrate and with a predominantly open microporosity. the residual stress of films transforms tensile from compressive with the increasing of y2o3 molar content, which corresponds to the evolutions of the structure and packing densities. (c) 2008 elsevier ltd. all rights reserved.
WOS关键词	ZIRCONIUM DIOXIDE ; EB-PVD ; MICROSTRUCTURE ; GROWTH
WOS研究方向	Materials Science ; Physics
WOS类目	Materials Science, Multidisciplinary ; Physics, Applied
语种	英语
出版者	PERGAMON-ELSEVIER SCIENCE LTD
WOS记录号	WOS:000260230400020
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2385268
专题	中国科学院大学
通讯作者	Xiao, Qi-Ling
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Xiao, Qi-Ling,Xu, Cheng,Shao, Shu-Ying,et al. Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses[J]. Vacuum,2008,83(2):366-371.
APA	Xiao, Qi-Ling,Xu, Cheng,Shao, Shu-Ying,Shao, Jian-Da,&Fan, Zheng-Xiu.(2008).Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses.Vacuum,83(2),366-371.
MLA	Xiao, Qi-Ling,et al."Y2o3 stabilized zro2 thin films deposited by electron-beam evaporation: optical properties, structure and residual stresses".Vacuum 83.2(2008):366-371.

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