| Analysis of the air damping in MEMS lateral driven microresonators | |
| Mingchun, Xie[1]; Xiaojing, Wang[2]; Maohua, Yu[3]; Minliang, Zhang[4]; Guoliang, Wang[5] | |
| 2007 | |
| 会议名称 | HDP'07: Proceedings of the 2007 International Symposium on High Density Packaging and Microsystem Integration |
| 会议日期 | 2007-06-26 |
| 关键词 | air damping microresonator ANSYS MEMS |
| 页码 | 466-469 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2385157 |
| 专题 | 上海大学 |
| 作者单位 | School of Mechatronics and Automation, Shanghai University, Shanghai, 200072, China |
| 推荐引用方式 GB/T 7714 | Mingchun, Xie[1],Xiaojing, Wang[2],Maohua, Yu[3],et al. Analysis of the air damping in MEMS lateral driven microresonators[C]. 见:HDP'07: Proceedings of the 2007 International Symposium on High Density Packaging and Microsystem Integration. 2007-06-26. |
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