3D Large scale visualization algorithm for photolithographic simulation | |
Cui, Bin[1]; Wan, Wanggen[2]; Tang, Jing-Jou[3]; Zhou, Junwei[4]; Tao, Dao[5] | |
2007 | |
会议名称 | IET Conference on Wireless, Mobile and Sensor Networks 2007, CCWMSN'07 |
会议日期 | 2007-12-12 |
页码 | 825-828 |
URL标识 | 查看原文 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2384585 |
专题 | 上海大学 |
作者单位 | [1]School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China [2]School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China [3]Department of Electrical Engineering, Southern Taiwan University of Technology, 710, Taiwan[4]School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China [5]School of Communication and Information Engineering, Shanghai University, Shanghai 200072, China |
推荐引用方式 GB/T 7714 | Cui, Bin[1],Wan, Wanggen[2],Tang, Jing-Jou[3],et al. 3D Large scale visualization algorithm for photolithographic simulation[C]. 见:IET Conference on Wireless, Mobile and Sensor Networks 2007, CCWMSN'07. 2007-12-12. |
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