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	Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer
	He, Guotian1,3; Wang, Xiangzhao1,3; Zeng, Aijun2; Tang, Feng1; Huang, Bingjie1,3
刊名	Chinese optics letters
	2007-04-10
卷号	5期号:4页码:211-214
ISSN号	1671-7694
通讯作者	He, guotian(slhgt@siom.ac.cn)
英文摘要	To resolve the conflict of large measurement range and high accuracy in the existing real-time displacement measurement laser diode (ld) interferometers, a novel real-time displacement measurement ld interferometry is proposed and its measurement principle is analyzed. by use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. in experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. the measurement time was less than 26 mu s.
WOS关键词	SURFACE PROFILE MEASUREMENT ; DISTANCE MEASUREMENT ; WAVELENGTH
WOS研究方向	Optics
WOS类目	Optics
语种	英语
出版者	SCIENCE CHINA PRESS
WOS记录号	WOS:000255023600008
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2382215
专题	中国科学院大学
通讯作者	He, Guotian
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Shanghai Hengyi Opt & Fine Mech Co Ltd, Shanghai 201800, Peoples R China 3.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	He, Guotian,Wang, Xiangzhao,Zeng, Aijun,et al. Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer[J]. Chinese optics letters,2007,5(4):211-214.
APA	He, Guotian,Wang, Xiangzhao,Zeng, Aijun,Tang, Feng,&Huang, Bingjie.(2007).Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer.Chinese optics letters,5(4),211-214.
MLA	He, Guotian,et al."Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer".Chinese optics letters 5.4(2007):211-214.

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