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	Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films
	Shen, J; Liu, SH; Shen, ZC; Kong, WJ; Huang, JB; Shao, JD; Fan, ZX
刊名	Acta physica sinica
	2005-10-01
卷号	54期号:10页码:4920-4925
关键词	Microdefect Optical thin film Inhomogeneous coating Optical property
ISSN号	1000-3290
通讯作者	Shen, j(shj@siom.ac.cn)
英文摘要	Based on the theory of inhomogeneous thin films, a model for refractive index of stratified dielectric substrate is firstly put forward. the substrate can be divided into surface layer, subsurface layer and bulk layer in turn. both the surface layer and subsurface layer, whose refractive indices obey statistical distributions, are equivalent to inhomogeneous thin films. they can be separated into n-1 and n-2 sublayers respetively which are regarded as homogenous thin films. subsequently, theoretical analysis was carried out utilizing the characteristic matrix method of optical thin films. numerical calculation for optical properties of single layer dielectric thin films was carried out. the computing results indicate that microdefects in surface layer and subsurface layer of the substrate alter the equivalent refractive indices of the thin film and the substrate, which leads to the deviation of pseudo-brewster angles and assembling reflectance from ideal conditions. meanwhile, these microdefects change the propagation characteristics in thin film and substrate, as a result the phase shift of reflection and phase difference deviate from ideal conditions. in addition, this model is also suitable for calculating the influence of microdefects in the substrate on optical propertied of multilayer dielectric thin films.
WOS关键词	DAMAGE
WOS研究方向	Physics
WOS类目	Physics, Multidisciplinary
语种	英语
出版者	CHINESE PHYSICAL SOC
WOS记录号	WOS:000232443100080
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2378339
专题	中国科学院大学
通讯作者	Shen, J
作者单位	1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China 3.Shaanxi Univ Sci & Technol, Sch Mat Sci & Engn, Xianyang 712081, Peoples R China
推荐引用方式 GB/T 7714	Shen, J,Liu, SH,Shen, ZC,et al. Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films[J]. Acta physica sinica,2005,54(10):4920-4925.
APA	Shen, J.,Liu, SH.,Shen, ZC.,Kong, WJ.,Huang, JB.,...&Fan, ZX.(2005).Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films.Acta physica sinica,54(10),4920-4925.
MLA	Shen, J,et al."Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films".Acta physica sinica 54.10(2005):4920-4925.

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