Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films | |
Shen, J; Liu, SH; Shen, ZC; Kong, WJ; Huang, JB; Shao, JD; Fan, ZX | |
刊名 | Acta physica sinica
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2005-10-01 | |
卷号 | 54期号:10页码:4920-4925 |
关键词 | Microdefect Optical thin film Inhomogeneous coating Optical property |
ISSN号 | 1000-3290 |
通讯作者 | Shen, j(shj@siom.ac.cn) |
英文摘要 | Based on the theory of inhomogeneous thin films, a model for refractive index of stratified dielectric substrate is firstly put forward. the substrate can be divided into surface layer, subsurface layer and bulk layer in turn. both the surface layer and subsurface layer, whose refractive indices obey statistical distributions, are equivalent to inhomogeneous thin films. they can be separated into n-1 and n-2 sublayers respetively which are regarded as homogenous thin films. subsequently, theoretical analysis was carried out utilizing the characteristic matrix method of optical thin films. numerical calculation for optical properties of single layer dielectric thin films was carried out. the computing results indicate that microdefects in surface layer and subsurface layer of the substrate alter the equivalent refractive indices of the thin film and the substrate, which leads to the deviation of pseudo-brewster angles and assembling reflectance from ideal conditions. meanwhile, these microdefects change the propagation characteristics in thin film and substrate, as a result the phase shift of reflection and phase difference deviate from ideal conditions. in addition, this model is also suitable for calculating the influence of microdefects in the substrate on optical propertied of multilayer dielectric thin films. |
WOS关键词 | DAMAGE |
WOS研究方向 | Physics |
WOS类目 | Physics, Multidisciplinary |
语种 | 英语 |
出版者 | CHINESE PHYSICAL SOC |
WOS记录号 | WOS:000232443100080 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2378339 |
专题 | 中国科学院大学 |
通讯作者 | Shen, J |
作者单位 | 1.Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Shanghai 201800, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China 3.Shaanxi Univ Sci & Technol, Sch Mat Sci & Engn, Xianyang 712081, Peoples R China |
推荐引用方式 GB/T 7714 | Shen, J,Liu, SH,Shen, ZC,et al. Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films[J]. Acta physica sinica,2005,54(10):4920-4925. |
APA | Shen, J.,Liu, SH.,Shen, ZC.,Kong, WJ.,Huang, JB.,...&Fan, ZX.(2005).Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films.Acta physica sinica,54(10),4920-4925. |
MLA | Shen, J,et al."Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films".Acta physica sinica 54.10(2005):4920-4925. |
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