| Controllable large scaled nanotwin formation in cu film at lower temperatures | |
| Cheng, Gong1,2; Li, Heng1,2; Zhang, Weibo1,2; Xu, Gaowei1; Luo, Le1 | |
| 刊名 | Journal of physics d-applied physics
 |
| 2016-10-12 | |
| 卷号 | 49期号:40页码:8 |
| 关键词 | Nanotwin Copper film Annealed twin Wafer level interconnect |
| ISSN号 | 0022-3727 |
| DOI | 10.1088/0022-3727/49/40/40lt01 |
| 通讯作者 | Luo, le(leluo@mail.sim.ac.cn) |
| 英文摘要 | By means of low temperature rapid annealing, it is found that an abrupt thermal stress relaxation occurs in cu film at the beginning of cooling, which greatly increases the driving force for twin nucleation and growth. consequently, high-density nanotwins (nt) are successfully produced in as-plated cu film at wafer-level under temperatures as low as 300 degrees c, which is much lower than conventional processes (above 550 degrees c), making it fully compatible with the semiconductor industry. this enhanced annealing processing provides not only a cost-effective approach for large scaled void-free nt-cu synthesis together with half-quantitatively controllable twin spacing, but demonstrates the prospect and significance of inconspicuous annealed nanotwins on the application of microelectronics. |
| WOS关键词 | IC PACKAGING TECHNOLOGY ; COPPER THIN-FILMS ; STRESS ; METALS ; TRANSITION ; CHALLENGES ; BOUNDARIES ; DIFFUSION ; STRENGTH ; GROWTH |
| WOS研究方向 | Physics |
| WOS类目 | Physics, Applied |
| 语种 | 英语 |
| 出版者 | IOP PUBLISHING LTD |
| WOS记录号 | WOS:000384104700001 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2375860 |
| 专题 | 中国科学院大学 |
| 通讯作者 | Luo, Le |
| 作者单位 | 1.Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Cheng, Gong,Li, Heng,Zhang, Weibo,et al. Controllable large scaled nanotwin formation in cu film at lower temperatures[J]. Journal of physics d-applied physics,2016,49(40):8. |
| APA | Cheng, Gong,Li, Heng,Zhang, Weibo,Xu, Gaowei,&Luo, Le.(2016).Controllable large scaled nanotwin formation in cu film at lower temperatures.Journal of physics d-applied physics,49(40),8. |
| MLA | Cheng, Gong,et al."Controllable large scaled nanotwin formation in cu film at lower temperatures".Journal of physics d-applied physics 49.40(2016):8. |
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