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	Interference-aided spectrum-fitting method for accurate film thickness determination
	Liu, Xingxing1,2,3; Wang, Shaowei1,2; Xia, Hui1; Zhang, Xutao1,3; Ji, Ruonan1,2,3; Li, Tianxin1,2; Lu, Wei1,2
刊名	Chinese optics letters
	2016-08-10
卷号	14期号:8页码:5
ISSN号	1671-7694
DOI	10.3788/col201614.081203
通讯作者	Wang, shaowei(wangshw@mail.sitp.ac.cn)
英文摘要	A new approach is proposed to accurately determine the thickness of films, especially for ultra-thin films, through spectrum-fitting with the assistance of an interference layer. the determination limit can reach even less than 1 nm. its accuracy is far better than that of the traditional methods. this determination method is verified by experiments, and the determination limit is at least 3.5 nm compared with the results of atomic force microscope (afm). furthermore, a double interference-aided spectra fitting method is proposed to reduce the requirements of the determination instruments, which thus allows one to determine the film's thickness with a low-precision common spectrometer and to greatly lower the cost. it is a very high-precision determination method for on-site and in-situ applications, especially for ultra-thin films.
WOS关键词	OPTICAL CHARACTERIZATION ; THIN ; TRANSMITTANCE ; ALGORITHM ; CONSTANTS ; COATINGS
WOS研究方向	Optics
WOS类目	Optics
语种	英语
出版者	CHINESE LASER PRESS
WOS记录号	WOS:000382513100010
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2375267
专题	中国科学院大学
通讯作者	Wang, Shaowei
作者单位	1.Chinese Acad Sci, Shanghai Inst Tech Phys, Natl Lab Infrared Phys, Shanghai 200083, Peoples R China 2.Shanghai Engn Res Ctr Energy Saving Coatings, Shanghai 200083, Peoples R China 3.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Liu, Xingxing,Wang, Shaowei,Xia, Hui,et al. Interference-aided spectrum-fitting method for accurate film thickness determination[J]. Chinese optics letters,2016,14(8):5.
APA	Liu, Xingxing.,Wang, Shaowei.,Xia, Hui.,Zhang, Xutao.,Ji, Ruonan.,...&Lu, Wei.(2016).Interference-aided spectrum-fitting method for accurate film thickness determination.Chinese optics letters,14(8),5.
MLA	Liu, Xingxing,et al."Interference-aided spectrum-fitting method for accurate film thickness determination".Chinese optics letters 14.8(2016):5.

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