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	Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator
	Li, Jian1,2; Liu, Mengwei1; Wang, Chenghao1
刊名	Micromachines
	2016-09-01
卷号	7期号:9页码:11
关键词	High-overtone bulk acoustic resonator Effective electromechanical coupling coefficient Resonance spectrum
ISSN号	2072-666X
DOI	10.3390/mi7090159
通讯作者	Liu, mengwei(liumw@mail.ioa.ac.cn) ; Wang, chenghao(chwang@mail.ioa.ac.cn)
英文摘要	A high-overtone bulk acoustic resonator (hbar) consisting of a piezoelectric film with two electrodes on a substrate exhibits a high quality factor (q) and multi-mode resonance spectrum. by analyzing the influences of each layer's material and structure (thickness) parameters on the effective electromechanical coupling coefficient (k-eff(2)), the resonance spectrum characteristics of k-eff(2) have been investigated systematically, and the optimal design of hbar has been provided. besides, a device, corresponding to one of the theoretical cases studied, is fabricated and evaluated. the experimental results are basically consistent with the theoretical results. finally, the effects of k-eff(2) on the function of the crystal oscillators constructed with hbars are proposed. the crystal oscillators can operate in more modes and have a larger frequency hopping bandwidth by using the hbars with a larger k(eff)(2)q.
WOS关键词	LOW PHASE NOISE ; COMPOSITE RESONATORS ; PIEZOELECTRIC FILMS ; FREQUENCY-SPECTRA ; ZNO FILMS ; HBAR
WOS研究方向	Science & Technology - Other Topics ; Instruments & Instrumentation
WOS类目	Nanoscience & Nanotechnology ; Instruments & Instrumentation
语种	英语
出版者	MDPI AG
WOS记录号	WOS:000385483000014
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2374793
专题	中国科学院大学
通讯作者	Liu, Mengwei; Wang, Chenghao
作者单位	1.Chinese Acad Sci, Inst Acoust, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Li, Jian,Liu, Mengwei,Wang, Chenghao. Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator[J]. Micromachines,2016,7(9):11.
APA	Li, Jian,Liu, Mengwei,&Wang, Chenghao.(2016).Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator.Micromachines,7(9),11.
MLA	Li, Jian,et al."Resonance spectrum characteristics of effective electromechanical coupling coefficient of high-overtone bulk acoustic resonator".Micromachines 7.9(2016):11.

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