A method of laser focusing control in micro-laser-induced breakdown spectroscopy

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	A method of laser focusing control in micro-laser-induced breakdown spectroscopy
	Sun LX(孙兰香)1,2,3 ; Wang W(汪为)1,2,3,4 ; Dong W(董伟)1,2,3 ; Qi LF(齐立峰)1,2,3 ; Zheng, LM(郑黎明)1,2,3; Zhang P(张鹏)1,2,3,4
刊名	PLASMA SCIENCE & TECHNOLOGY
	2019
卷号	21 期号:3 页码:1-9
关键词	LIBS microanalysis ablation crater focusing control
ISSN号	1009-0630
产权排序	1
英文摘要	This paper presents a method for the automatic adjustment of the laser defocusing amount in micro-laser-induced breakdown spectroscopy. A microscopic optical imaging system consisting of a CCD camera and a 20x objective lens was adopted to realize the method. The real-time auto-focusing of the system was achieved by detecting the effective pixels of the light spot generated by the laser pointer. The focusing accuracy of the method could achieve 3 mu m. The element concentrations of Mn and Ni in low-alloy steels were analyzed at a crater diameter of about 35 mu m using the presented method. After using the presented method, the determination coefficients of Mn and Ni both exceeded 0.997, with the root-mean-square errors being 0.0133 and 0.0395, respectively. Scanning analysis was performed on the inclined plane and the curved surface by means of focusing control and non-focusing control. Ten characteristic spectral lines of Fe were selected as the analysis lines. With the focusing control, the average relative standard deviations obtained on the inclined plane and curved surface were both less than 5%, and much less than the values without focusing control, 14.6% and 40.39%.
资助项目	National Key Research and Development Program of China[2017YFF0106202] ; National Natural Science Foundation of China[61473279] ; Key Research Program of Frontier Sciences, CAS[QYZDJ-SSW-JSC037] ; Youth Innovation Promotion Association, CAS
WOS关键词	QUANTITATIVE-ANALYSIS ; ELEMENTAL ANALYSIS ; MU-LIBS ; STEEL ; MICROANALYSIS ; SPECTROMETRY ; ALLOYS
WOS研究方向	Physics
语种	英语
WOS记录号	WOS:000451072800004
资助机构	National Key Research and Development Program of China ; National Natural Science Foundation of China ; Key Research Program of Frontier Sciences, CAS ; Youth Innovation Promotion Association, CAS
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/23666]
专题	沈阳自动化研究所_工业控制网络与系统研究室
通讯作者	Sun LX(孙兰香)
作者单位	1.Key Laboratory of Networked Control System, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China 2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China 3.Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110016, People's Republic of China 4.University of Chinese Academy of Sciences, Beijing 100049, People's Republic of China
推荐引用方式 GB/T 7714	Sun LX,Wang W,Dong W,et al. A method of laser focusing control in micro-laser-induced breakdown spectroscopy[J]. PLASMA SCIENCE & TECHNOLOGY,2019,21(3):1-9.
APA	Sun LX,Wang W,Dong W,Qi LF,Zheng, LM,&Zhang P.(2019).A method of laser focusing control in micro-laser-induced breakdown spectroscopy.PLASMA SCIENCE & TECHNOLOGY,21(3),1-9.
MLA	Sun LX,et al."A method of laser focusing control in micro-laser-induced breakdown spectroscopy".PLASMA SCIENCE & TECHNOLOGY 21.3(2019):1-9.