Photonic Nanojet Sub-Diffraction Nano-Fabrication With in situ Super-Resolution Imaging

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	Photonic Nanojet Sub-Diffraction Nano-Fabrication With in situ Super-Resolution Imaging
	Wen YD(文扬东)1,4 ; Li WJ(李文荣)1,2; Liu LQ(刘连庆)1 ; Wang XD(王晓朵)1; Wang FF(王飞飞)3; Zhao WX(赵文秀)1,4 ; Yu HB(于海波)1
刊名	IEEE TRANSACTIONS ON NANOTECHNOLOGY
	2019
卷号	18 页码:226-233
关键词	Photonic Nanojet nano-scale processing laser processing super-resolution imaging
ISSN号	1536-125X
产权排序	1
英文摘要	In this paper, we report a system that uses a microsphere to induce a photonic nanojet to directly write on a sample surface with sub-diffraction limit resolution, while simultaneously observing the writing processing in situ. Because of diffraction limit, sub-wavelength laser processing resolution has been difficult to achieve. Recently, we have shown that a microsphere-induced photonics nanojet could be used to create an optical light spot size beyond the diffraction limits, i.e., the diameter of the light spot could be reduced to -200 nm or smaller. This capability could allow a laser (with significant reduction in input power) to pattern nano-scale structures on various substrate materials through the use of microspheres. Many researchers have attempted to use this photonic nanojet (PNJ) based technique to process sub-diffraction limit patterns on all types of materials. However, applying this method to process features at precise locations is very difficult, because the technique requires that a sample being "cut" by the PNJ be observed by a common optical microscope, which cannot resolve features smaller than the optical diffraction limit. This disadvantage limits the applicability of this novel method to nanoscale processing; for example, in trimming resistors in an integrated circuit chip, many circuit components on the chip are much smaller than 200 nm, and not being able to see features beyond the diffraction limit will inadvertently destroy many components while PNJ is used to trim resistive elements. We will show in this paper that processing resolution better than 200 nm is achievable using our laser-based photonic nanojet method, whereas a simultaneous imaging resolution of less than lambda/2 could be obtained. Therefore, the method presented in this paper has potential applications in processing sub-diffraction features and bio-specimens in real time with optical information feedback.
资助项目	National Natural Science Foundation of China[61433017] ; National Natural Science Foundation of China[61503258] ; National Natural Science Foundation of China[61727811] ; National Natural Science Foundation of China[61803323] ; NSFC/RGC Joint Research Scheme[51461165501] ; NSFC/RGC Joint Research Scheme[N_CityU132/14] ; Hong Kong Research Grants Council[11205415] ; CAS FEA International Partnership Program for Creative Research Teams ; Youth Innovation Promotion Association CAS ; Beijing Advanced Innovation Center for Intelligent Robots and Systems, Beijing Institute of Technology[2016IRS08]
WOS关键词	FEMTOSECOND LASER ; MICROSCOPY ; NANOFABRICATION ; NANOPARTICLES ; LIGHT ; FIELD
WOS研究方向	Engineering ; Science & Technology - Other Topics ; Materials Science ; Physics
语种	英语
WOS记录号	WOS:000459538800001
资助机构	National Natural Science Foundation of China ; NSFC/RGC Joint Research Scheme ; Hong Kong Research Grants Council ; CAS FEA International Partnership Program for Creative Research Teams ; Youth Innovation Promotion Association CAS ; Beijing Advanced Innovation Center for Intelligent Robots and Systems, Beijing Institute of Technology
内容类型	期刊论文
源URL	[http://ir.sia.cn/handle/173321/24252]
专题	沈阳自动化研究所_机器人学研究室
通讯作者	Li WJ(李文荣); Liu LQ(刘连庆)
作者单位	1.State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 2.e Department of Mechanical Engineering, City University of Hong Kong, Kowloon Tong, Hong Kong 3.e Department of Chemistry, Stanford University, Stanford, CA 94305 USA 4.University of Chinese Academy of Sciences, Beijing 100049, China
推荐引用方式 GB/T 7714	Wen YD,Li WJ,Liu LQ,et al. Photonic Nanojet Sub-Diffraction Nano-Fabrication With in situ Super-Resolution Imaging[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2019,18:226-233.
APA	Wen YD.,Li WJ.,Liu LQ.,Wang XD.,Wang FF.,...&Yu HB.(2019).Photonic Nanojet Sub-Diffraction Nano-Fabrication With in situ Super-Resolution Imaging.IEEE TRANSACTIONS ON NANOTECHNOLOGY,18,226-233.
MLA	Wen YD,et al."Photonic Nanojet Sub-Diffraction Nano-Fabrication With in situ Super-Resolution Imaging".IEEE TRANSACTIONS ON NANOTECHNOLOGY 18(2019):226-233.