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	Al-induced crystallization of amorphous silicon film
	Zhou, Pingsheng[1]; Shi, Weimin[2]; Jin, Jing[3]; Qian, Jun[4]; Qu, Xiaolei[5]; Wang, Linjun[6]
	2013
会议名称	FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE III, PTS 1 AND 2
会议日期	2012-12-11
关键词	amorphous silicon Al induced crystallization polycrystalline silicon
页码	292-296
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2290053
专题	上海大学
作者单位	1.[1]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 2.[2]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 3.[3]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 4.[4]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 5.[5]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 6.[6]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China.
推荐引用方式 GB/T 7714	Zhou, Pingsheng[1],Shi, Weimin[2],Jin, Jing[3],et al. Al-induced crystallization of amorphous silicon film[C]. 见:FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE III, PTS 1 AND 2. 2012-12-11.

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