Al-induced crystallization of amorphous silicon film | |
Zhou, Pingsheng[1]; Shi, Weimin[2]; Jin, Jing[3]; Qian, Jun[4]; Qu, Xiaolei[5]; Wang, Linjun[6] | |
2013 | |
会议名称 | FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE III, PTS 1 AND 2 |
会议日期 | 2012-12-11 |
关键词 | amorphous silicon Al induced crystallization polycrystalline silicon |
页码 | 292-296 |
URL标识 | 查看原文 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2290053 |
专题 | 上海大学 |
作者单位 | 1.[1]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 2.[2]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 3.[3]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 4.[4]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 5.[5]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. 6.[6]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China. |
推荐引用方式 GB/T 7714 | Zhou, Pingsheng[1],Shi, Weimin[2],Jin, Jing[3],et al. Al-induced crystallization of amorphous silicon film[C]. 见:FRONTIERS OF MANUFACTURING AND DESIGN SCIENCE III, PTS 1 AND 2. 2012-12-11. |
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