| INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ITO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING | |
| He, Bo[1]; Zhao, Lei[2]; Xu, Jing[3]; Xing, Huaizhong[4]; Xue, Shaolin[5]; Jiang, Meng[6] | |
| 刊名 | SURFACE REVIEW AND LETTERS
 |
| 2013 | |
| 卷号 | 20 |
| 关键词 | Indium-tin-oxide (ITO) RF magnetron sputtering structure electrical properties optical properties |
| ISSN号 | 0218-625X |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2289241 |
| 专题 | 上海大学 |
| 作者单位 | 1.[1]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modicat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China. 2.[2]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China. 3.[3]Shanghai Univ, Instrumental Anal & Res Ctr, Shanghai 200444, Peoples R China. 4.[4]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modicat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China. 5.[5]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modicat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China. 6.[6]Donghua Univ, Dept Appl Phys, Shanghai 201620, Peoples R China.,Donghua Univ, State Key Lab Modicat Chem Fibers & Polymer Mat, Shanghai 201620, Peoples R China. |
| 推荐引用方式 GB/T 7714 | He, Bo[1],Zhao, Lei[2],Xu, Jing[3],et al. INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ITO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING[J]. SURFACE REVIEW AND LETTERS,2013,20. |
| APA | He, Bo[1],Zhao, Lei[2],Xu, Jing[3],Xing, Huaizhong[4],Xue, Shaolin[5],&Jiang, Meng[6].(2013).INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ITO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING.SURFACE REVIEW AND LETTERS,20. |
| MLA | He, Bo[1],et al."INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ITO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING".SURFACE REVIEW AND LETTERS 20(2013). |
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