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	Controlling the Density of CNTs by Different UnderlayerMaterials in PECVD Growth
	Xu, Liang[1]; Jiang, Di[2]; Fu, Yifeng[3]; Tu, Shantung[4]; Liu, Johan[5]
	2013
会议名称	19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)
页码	248-252
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2287438
专题	上海大学
作者单位	1.[1]Chalmers, BioNano Syst Lab, Dept Microtechnol & Nanosci MC2, S-41296 Gothenburg, Sweden. 2.East China Univ Sci & Technol, Sch Mech & Power Engn, Div Proc Equipment Sci & Engn, Shanghai, Peoples R China. 3.[2]Chalmers, BioNano Syst Lab, Dept Microtechnol & Nanosci MC2, S-41296 Gothenburg, Sweden. 4.[3]SHT Smart High Tech AB, Gothenburg, Sweden. 5.[4]East China Univ Sci & Technol, Sch Mech & Power Engn, Div Proc Equipment Sci & Engn, Shanghai, Peoples R China. 6.[5]Chalmers, BioNano Syst Lab, Dept Microtechnol & Nanosci MC2, S-41296 Gothenburg, Sweden. 7.Shanghai Univ, SMIT Ctr, Key Lab New Displays & Syst Integrat, Shanghai, Peoples R China.,Shanghai Univ, Sch Mechatron & Mech Engn, Shanghai, Peoples R China.
推荐引用方式 GB/T 7714	Xu, Liang[1],Jiang, Di[2],Fu, Yifeng[3],et al. Controlling the Density of CNTs by Different UnderlayerMaterials in PECVD Growth[C]. 见:19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC).

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