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Thermal conductivity measurement of amorphous Si/SiGe multilayer films by 3 omega method
Shen, Binjie[1]; Zeng, Zhigang[2]; Lin, Cong[3]; Hu, Zhiyu[4]
刊名INTERNATIONAL JOURNAL OF THERMAL SCIENCES
2013
卷号66页码:19-23
关键词Amorphous multilayer Thermal conductivity 3 omega method Phonon mean free path
ISSN号1290-0729
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2287190
专题上海大学
作者单位1.[1]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China.,Shanghai Univ, Inst NanoMicroEnergy, Shanghai 200444, Peoples R China.
2.[2]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China.,Shanghai Univ, Inst NanoMicroEnergy, Shanghai 200444, Peoples R China.
3.[3]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China.,Shanghai Univ, Inst NanoMicroEnergy, Shanghai 200444, Peoples R China.
4.[4]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China.,Shanghai Univ, Inst NanoMicroEnergy, Shanghai 200444, Peoples R China.
推荐引用方式
GB/T 7714
Shen, Binjie[1],Zeng, Zhigang[2],Lin, Cong[3],et al. Thermal conductivity measurement of amorphous Si/SiGe multilayer films by 3 omega method[J]. INTERNATIONAL JOURNAL OF THERMAL SCIENCES,2013,66:19-23.
APA Shen, Binjie[1],Zeng, Zhigang[2],Lin, Cong[3],&Hu, Zhiyu[4].(2013).Thermal conductivity measurement of amorphous Si/SiGe multilayer films by 3 omega method.INTERNATIONAL JOURNAL OF THERMAL SCIENCES,66,19-23.
MLA Shen, Binjie[1],et al."Thermal conductivity measurement of amorphous Si/SiGe multilayer films by 3 omega method".INTERNATIONAL JOURNAL OF THERMAL SCIENCES 66(2013):19-23.
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