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	Preparation of porous alumina/ceria composite abrasive and its chemical mechanical polishing behavior
	Chen, Sisi[1]; Lei, Hong[2]; Chen, Ruling[3]
刊名	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
	2013
卷号	31
ISSN号	1071-1023
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2287143
专题	上海大学
作者单位	1.[1]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 3.[3]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Chen, Sisi[1],Lei, Hong[2],Chen, Ruling[3]. Preparation of porous alumina/ceria composite abrasive and its chemical mechanical polishing behavior[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2013,31.
APA	Chen, Sisi[1],Lei, Hong[2],&Chen, Ruling[3].(2013).Preparation of porous alumina/ceria composite abrasive and its chemical mechanical polishing behavior.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,31.
MLA	Chen, Sisi[1],et al."Preparation of porous alumina/ceria composite abrasive and its chemical mechanical polishing behavior".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 31(2013).

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