Controlling the density of CNTs by different underlayer materials in PECVD growth | |
Xu, Liang[1]; Jiang, Di[2]; Fu, Yifeng[3]; Tu, Shantung[4]; Liu, Johan[5] | |
2013 | |
会议名称 | 19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013 |
会议日期 | 2013-09-25 |
页码 | 248-252 |
URL标识 | 查看原文 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2286369 |
专题 | 上海大学 |
作者单位 | [1]BioNano Systems Laboratory, Department of Microtechnology and Nanoscience , Chalmers University of Technology, Goteborg, Sweden |Division of Process Equipment Science and Engineering, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, China [2]BioNano Systems Laboratory, Department of Microtechnology and Nanoscience , Chalmers University of Technology, Goteborg, Sweden [3]SHT Smart High Tech AB, Goteborg, Sweden [4]SHT Smart High Tech AB, Goteborg, Sweden [5]BioNano Systems Laboratory, Department of Microtechnology and Nanoscience , Chalmers University of Technology, Goteborg, Sweden |Key Laboratory of New Displays and System Integration, SMIT Center, and School of Mechatronics and Mechanical Engineering, Shanghai University, Shanghai, China |
推荐引用方式 GB/T 7714 | Xu, Liang[1],Jiang, Di[2],Fu, Yifeng[3],et al. Controlling the density of CNTs by different underlayer materials in PECVD growth[C]. 见:19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013. 2013-09-25. |
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