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	Controlling the density of CNTs by different underlayer materials in PECVD growth
	Xu, Liang[1]; Jiang, Di[2]; Fu, Yifeng[3]; Tu, Shantung[4]; Liu, Johan[5]
	2013
会议名称	19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013
会议日期	2013-09-25
页码	248-252
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2286369
专题	上海大学
作者单位	[1]BioNano Systems Laboratory, Department of Microtechnology and Nanoscience , Chalmers University of Technology, Goteborg, Sweden |Division of Process Equipment Science and Engineering, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, China [2]BioNano Systems Laboratory, Department of Microtechnology and Nanoscience , Chalmers University of Technology, Goteborg, Sweden [3]SHT Smart High Tech AB, Goteborg, Sweden [4]SHT Smart High Tech AB, Goteborg, Sweden [5]BioNano Systems Laboratory, Department of Microtechnology and Nanoscience , Chalmers University of Technology, Goteborg, Sweden |Key Laboratory of New Displays and System Integration, SMIT Center, and School of Mechatronics and Mechanical Engineering, Shanghai University, Shanghai, China
推荐引用方式 GB/T 7714	Xu, Liang[1],Jiang, Di[2],Fu, Yifeng[3],et al. Controlling the density of CNTs by different underlayer materials in PECVD growth[C]. 见:19th International Workshop on Thermal Investigations of ICs and Systems, THERMINIC 2013. 2013-09-25.

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