Effect of AIBA on Abrasive-free Polishing of Hard Disk Substrate with Peroxyacetic Acid System Slurry | |
Ren, Xiao-yan[1]; Lei, Hong[2] | |
2014 | |
会议名称 | Design, Manufacturing and Mechatronics |
会议日期 | 2014-03-21 |
关键词 | AIBA peroxyacetic acid abrasive-free polishing (AFP) |
页码 | 61-65 |
URL标识 | 查看原文 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2279676 |
专题 | 上海大学 |
作者单位 | 1.[1]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. |
推荐引用方式 GB/T 7714 | Ren, Xiao-yan[1],Lei, Hong[2]. Effect of AIBA on Abrasive-free Polishing of Hard Disk Substrate with Peroxyacetic Acid System Slurry[C]. 见:Design, Manufacturing and Mechatronics. 2014-03-21. |
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