| Effect of AIBA on Abrasive-free Polishing of Hard Disk Substrate with Peroxyacetic Acid System Slurry | |
| Ren, Xiao-yan[1]; Lei, Hong[2] | |
| 2014 | |
| 会议名称 | Design, Manufacturing and Mechatronics |
| 会议日期 | 2014-03-21 |
| 关键词 | AIBA peroxyacetic acid abrasive-free polishing (AFP) |
| 页码 | 61-65 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2279676 |
| 专题 | 上海大学 |
| 作者单位 | 1.[1]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Ren, Xiao-yan[1],Lei, Hong[2]. Effect of AIBA on Abrasive-free Polishing of Hard Disk Substrate with Peroxyacetic Acid System Slurry[C]. 见:Design, Manufacturing and Mechatronics. 2014-03-21. |
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