Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering | |
Lu, Hui[1]; Zheng, Zhi-Jia[2]; Lin, Xian[3]; Xu, Fei[4]; Bi, Han[5]; Laaksonen, Aatto[6] | |
刊名 | JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS |
2014 | |
卷号 | 16页码:170-175 |
关键词 | ZnO Thin films RE magnetron sputtering Deposition Microstructure Optical properties |
ISSN号 | 1454-4164 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2277546 |
专题 | 上海大学 |
作者单位 | 1.[1]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China. 2.[2]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China. 3.[3]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China. 4.[4]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China. 5.[5]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China. 6.[6]Stockholm Univ, Dept Mat & Environm Chem, Div Phys Chem, S-10691 Stockholm, Sweden. |
推荐引用方式 GB/T 7714 | Lu, Hui[1],Zheng, Zhi-Jia[2],Lin, Xian[3],et al. Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering[J]. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS,2014,16:170-175. |
APA | Lu, Hui[1],Zheng, Zhi-Jia[2],Lin, Xian[3],Xu, Fei[4],Bi, Han[5],&Laaksonen, Aatto[6].(2014).Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering.JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS,16,170-175. |
MLA | Lu, Hui[1],et al."Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering".JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS 16(2014):170-175. |
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