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Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering
Lu, Hui[1]; Zheng, Zhi-Jia[2]; Lin, Xian[3]; Xu, Fei[4]; Bi, Han[5]; Laaksonen, Aatto[6]
刊名JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS
2014
卷号16页码:170-175
关键词ZnO Thin films RE magnetron sputtering Deposition Microstructure Optical properties
ISSN号1454-4164
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2277546
专题上海大学
作者单位1.[1]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China.
2.[2]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China.
3.[3]Shanghai Univ, Dept Phys, Shanghai 200444, Peoples R China.
4.[4]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China.
5.[5]E China Univ Sci & Technol, Dept Phys, Shanghai 200237, Peoples R China.
6.[6]Stockholm Univ, Dept Mat & Environm Chem, Div Phys Chem, S-10691 Stockholm, Sweden.
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GB/T 7714
Lu, Hui[1],Zheng, Zhi-Jia[2],Lin, Xian[3],et al. Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering[J]. JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS,2014,16:170-175.
APA Lu, Hui[1],Zheng, Zhi-Jia[2],Lin, Xian[3],Xu, Fei[4],Bi, Han[5],&Laaksonen, Aatto[6].(2014).Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering.JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS,16,170-175.
MLA Lu, Hui[1],et al."Grain growth behavior, surface morphology evolution, structures, and optical properties of ZnO thin films prepared by RF reactive magnetron sputtering".JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS 16(2014):170-175.
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