An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam | |
Liao, Kai1,2,3; Wang, Wenjun1,2,3; Mei, Xuesong1,2,3; Cui, Jianlei1,2,3; Li, Ming4; Li, Xun4 | |
刊名 | Optik |
2019-05 | |
卷号 | 185页码:232-241 |
关键词 | Femtosecond bessel beam Sizes of modified layer Analytical model Regression analysis Range analysis |
ISSN号 | 00304026 |
DOI | 10.1016/j.ijleo.2019.03.071 |
产权排序 | 4 |
英文摘要 | Femtosecond Bessel beam is advantageous in high-quality glass cutting because of its resistance to diffraction. However, the sizes of the modified layer in the glass ablated by Bessel beam can be affected by many factors. In this study, an analytical model to predict the sizes(the depth and the maximum diameter) of modified layer in glass with femtosecond Bessel beam based on an axicon through an orthogonal experiment L16(44) was conducted. The coefficient values of four factors are obtained through the Matlab multiple linear regression function based on the experimental data. Simultaneously, the significance of the regression equation was tested by using the F-value test and the verification test. It found that the experimental results are consistent with the theoretical results. The combined processing parameters with the largest aspect ratio are determined through the range analysis and the influence of the various factors on the sizes was obtained. Finally, an application of thin glass cutting by the internal modification and breaking process is demonstrated. The glass is well cut with the chipping on the breaking edge © 2019 Elsevier GmbH |
语种 | 英语 |
出版者 | Elsevier GmbH |
WOS记录号 | WOS:000476692600032 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/31359] |
专题 | 西安光学精密机械研究所_瞬态光学技术国家重点实验室 |
通讯作者 | Wang, Wenjun |
作者单位 | 1.State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, 99 Yanxiang Road, Xi'an; Shaanxi; 710054, China; 2.Shaanxi Key Laboratory of Intelligent Robots, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an; Shaanxi; 710049, China; 3.School of Mechanical Engineering, Xi'an Jiaotong University, 28 West Xianning Road, Xi'an; Shaanxi; 710049, China; 4.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an; 710119, China |
推荐引用方式 GB/T 7714 | Liao, Kai,Wang, Wenjun,Mei, Xuesong,et al. An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam[J]. Optik,2019,185:232-241. |
APA | Liao, Kai,Wang, Wenjun,Mei, Xuesong,Cui, Jianlei,Li, Ming,&Li, Xun.(2019).An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam.Optik,185,232-241. |
MLA | Liao, Kai,et al."An analytical model to predict the sizes of modified layer in glass with femtosecond Bessel beam".Optik 185(2019):232-241. |
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