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	Highly c-axis oriented AlN film grown by unbalanced magnetron reactive sputtering and its electrical properties
	Ke, Genshui[1]; Tao, Yuan[2]; Lu, Yisheng[3]; Bian, Yingbin[4]; Zhu, Tao[5]; Guo, Haibo[6]; Chen, Yigang[7]
刊名	JOURNAL OF ALLOYS AND COMPOUNDS
	2015
卷号	646页码:446-453
关键词	Aluminum nitride Thin films Magnetron reactive sputtering Unbalanced magnetic field Additional magnetic field Electric properties
ISSN号	0925-8388
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2238957
专题	上海大学
作者单位	1.[1]Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China. 3.[3]Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China. 4.[4]Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China. 5.[5]Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China. 6.[6]Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China. 7.[7]Shanghai Univ, Sch Mat Sci & Engn, Dept Elect Informat Mat, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Ke, Genshui[1],Tao, Yuan[2],Lu, Yisheng[3],et al. Highly c-axis oriented AlN film grown by unbalanced magnetron reactive sputtering and its electrical properties[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2015,646:446-453.
APA	Ke, Genshui[1].,Tao, Yuan[2].,Lu, Yisheng[3].,Bian, Yingbin[4].,Zhu, Tao[5].,...&Chen, Yigang[7].(2015).Highly c-axis oriented AlN film grown by unbalanced magnetron reactive sputtering and its electrical properties.JOURNAL OF ALLOYS AND COMPOUNDS,646,446-453.
MLA	Ke, Genshui[1],et al."Highly c-axis oriented AlN film grown by unbalanced magnetron reactive sputtering and its electrical properties".JOURNAL OF ALLOYS AND COMPOUNDS 646(2015):446-453.

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