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	Post-Growth Processing of Carbon Nanotubes for Interconnect Applications - A Review
	Fu, Yifeng[1]; Mu, Wei[2]; Sun, Shuangxi[3]; Wang, Ning[4]; Huang, Shirong[5]; Liu, Johan[6]
	2016
会议名称	6th Electronic System-Integration Technology Conference (ESTC)
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2227075
专题	上海大学
作者单位	1.[1]Chalmers, Dept Microtechnol & Nanosci MC2, Elect Mat & Syst Lab, Kemivagen 9, SE-41296 Gothenburg, Sweden. 2.SHT Smart High Tech AB, Aschebergsgatan 46, SE-41133 Gothenburg, Sweden. 3.[2]Chalmers, Dept Microtechnol & Nanosci MC2, Elect Mat & Syst Lab, Kemivagen 9, SE-41296 Gothenburg, Sweden. 4.Shanghai Univ, SMIT Ctr, 20 Chengzhong Rd, Shanghai, Peoples R China.,Shanghai Univ, Sch Mechatron & Mech Engn, Nanomicro Res Inst, 20 Chengzhong Rd, Shanghai, Peoples R China. 5.[3]Chalmers, Dept Microtechnol & Nanosci MC2, Elect Mat & Syst Lab, Kemivagen 9, SE-41296 Gothenburg, Sweden. 6.Shanghai Univ, SMIT Ctr, 20 Chengzhong Rd, Shanghai, Peoples R China.,Shanghai Univ, Sch Mechatron & Mech Engn, Nanomicro Res Inst, 20 Chengzhong Rd, Shanghai, Peoples R China. 7.[4]Shanghai Univ, SMIT Ctr, 20 Chengzhong Rd, Shanghai, Peoples R China.,Shanghai Univ, Sch Mechatron & Mech Engn, Nanomicro Res Inst, 20 Chengzhong Rd, Shanghai, Peoples R China. 8.[5]Shanghai Univ, SMIT Ctr, 20 Chengzhong Rd, Shanghai, Peoples R China.,Shanghai Univ, Sch Mechatron & Mech Engn, Nanomicro Res Inst, 20 Chengzhong Rd, Shanghai, Peoples R China. 9.[6]Chalmers, Dept Microtechnol & Nanosci MC2, Elect Mat & Syst Lab, Kemivagen 9, SE-41296 Gothenburg, Sweden. 10.Shanghai Univ, SMIT Ctr, 20 Chengzhong Rd, Shanghai, Peoples R China.,Shanghai Univ, Sch Mechatron & Mech Engn, Nanomicro Res Inst, 20 Chengzhong Rd, Shanghai, Peoples R China.
推荐引用方式 GB/T 7714	Fu, Yifeng[1],Mu, Wei[2],Sun, Shuangxi[3],et al. Post-Growth Processing of Carbon Nanotubes for Interconnect Applications - A Review[C]. 见:6th Electronic System-Integration Technology Conference (ESTC).

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