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	Study on 3D characterized profile and point accuracies of ground micro-pyramid-structured Si surface
	Xie, Jin[1]; Lu, Yong-Xian[1]; Liu, Xu-Ran[1]; Lu, Yan-Jun[1]
刊名	INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
	2013
卷号	14页码:627-634
关键词	Micro-structured surface Micro-grinding Characterized profile Characterized point ICP matching
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2221591
专题	华南理工大学
作者单位	S China Univ Technol, Sch Mech & Automot Engn, Guangzhou 510640, Guangdong, Peoples R China
推荐引用方式 GB/T 7714	Xie, Jin[1],Lu, Yong-Xian[1],Liu, Xu-Ran[1],et al. Study on 3D characterized profile and point accuracies of ground micro-pyramid-structured Si surface[J]. INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,2013,14:627-634.
APA	Xie, Jin[1],Lu, Yong-Xian[1],Liu, Xu-Ran[1],&Lu, Yan-Jun[1].(2013).Study on 3D characterized profile and point accuracies of ground micro-pyramid-structured Si surface.INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING,14,627-634.
MLA	Xie, Jin[1],et al."Study on 3D characterized profile and point accuracies of ground micro-pyramid-structured Si surface".INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING 14(2013):627-634.

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