| Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint | |
| Liu,Bin; Cui,Zheng; Wang,Xudi; Fu,Shaojun; Ge,Liangjin; Liao,Yanlin; Chen,Yifang; Li,Guanghua | |
| 刊名 | Microelectronic Engineering
 |
| 2008 | |
| 卷号 | Vol.85 NO.5-6页码:910-913 |
| 关键词 | Subwavelength gratings SU-8 resist Free-standing UV curing imprint Near infrared |
| ISSN号 | 0167-9317 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2200951 |
| 专题 | 安徽大学 |
| 作者单位 | 1.Hefei University of Technology, Hefei 230009, PR China 2.Anhui University, Hefei 230039, PR China 3.Rutherford Appleton Laboratory, Chilton, Didcot, Oxon OX11 0QX, UK 4.University of Science and Technology of China, Hefei 230000, PR China 5.Hefei Sunshine Optoelectronics Science and Technology Co., Ltd., Hefei 230088, PR China |
| 推荐引用方式 GB/T 7714 | Liu,Bin,Cui,Zheng,Wang,Xudi,et al. Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint[J]. Microelectronic Engineering,2008,Vol.85 NO.5-6:910-913. |
| APA | Liu,Bin.,Cui,Zheng.,Wang,Xudi.,Fu,Shaojun.,Ge,Liangjin.,...&Li,Guanghua.(2008).Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint.Microelectronic Engineering,Vol.85 NO.5-6,910-913. |
| MLA | Liu,Bin,et al."Free-standing SU-8 subwavelength gratings fabricated by UV curing imprint".Microelectronic Engineering Vol.85 NO.5-6(2008):910-913. |
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