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	Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias
	Guo, Ting[1]; Kong, Cuicui[2]; Li, Xiaowei[3]; Guo, Peng[4]; Wang, Zhenyu[5]; Wang, Aiying[6]
刊名	APPLIED SURFACE SCIENCE
	2017
卷号	410页码:51-59
关键词	Diamond-like carbon Process parameters Ti/Al co-doping Residual compressive stress Mechanical properties Hybrid ion beam technique
ISSN号	0169-4332
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2190601
专题	上海大学
作者单位	1.[1]Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China. 2.Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 3.[2]Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China. 4.Ningbo Univ, Ningbo 315201, Zhejiang, Peoples R China. 5.[3]Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China. 6.[4]Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China. 7.[5]Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China. 8.[6]Chinese Acad Sci, Ningbo Inst Mat Technol & Engn, Key Lab Marine Mat & Related Technol, Zhejiang Key Lab Marine Mat & Protect Technol, Ningbo 315201, Zhejiang, Peoples R China.
推荐引用方式 GB/T 7714	Guo, Ting[1],Kong, Cuicui[2],Li, Xiaowei[3],et al. Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias[J]. APPLIED SURFACE SCIENCE,2017,410:51-59.
APA	Guo, Ting[1],Kong, Cuicui[2],Li, Xiaowei[3],Guo, Peng[4],Wang, Zhenyu[5],&Wang, Aiying[6].(2017).Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias.APPLIED SURFACE SCIENCE,410,51-59.
MLA	Guo, Ting[1],et al."Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias".APPLIED SURFACE SCIENCE 410(2017):51-59.

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