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	Fast fabrication of TiO2 hard stamps for nanoimprint lithography
	Ma, Pengsha[1]; Xu, Zhen[2]; Wang, Min[3]; Lu, Linfeng[4]; Yin, Min[5]; Chen, Xiaoyuan[6]; Li, Dongdong[7]; Ren, Wei[8]
刊名	MATERIALS RESEARCH BULLETIN
	2017
卷号	90页码:253-259
关键词	Nanoimprinting lithography TiO2 hard stamp Sol-gel Mechanical durability
ISSN号	0025-5408
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2190558
专题	上海大学
作者单位	1.[1]Shanghai Univ, Dept Phys, Int Ctr Quantum & Mol Struct, Shanghai 200444, Peoples R China.,Shanghai Univ, Mat Genome Inst, Shanghai 200444, Peoples R China. 2.Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China. 3.[2]Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China. 4.[3]Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China. 5.[4]Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China. 6.[5]Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China. 7.[6]Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China. 8.[7]Chinese Acad Sci, Shanghai Adv Res Inst, Shanghai 201210, Peoples R China. 9.[8]Shanghai Univ, Dept Phys, Int Ctr Quantum & Mol Struct, Shanghai 200444, Peoples R China.,Shanghai Univ, Mat Genome Inst, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Ma, Pengsha[1],Xu, Zhen[2],Wang, Min[3],et al. Fast fabrication of TiO2 hard stamps for nanoimprint lithography[J]. MATERIALS RESEARCH BULLETIN,2017,90:253-259.
APA	Ma, Pengsha[1].,Xu, Zhen[2].,Wang, Min[3].,Lu, Linfeng[4].,Yin, Min[5].,...&Ren, Wei[8].(2017).Fast fabrication of TiO2 hard stamps for nanoimprint lithography.MATERIALS RESEARCH BULLETIN,90,253-259.
MLA	Ma, Pengsha[1],et al."Fast fabrication of TiO2 hard stamps for nanoimprint lithography".MATERIALS RESEARCH BULLETIN 90(2017):253-259.

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