QQ客服 官方微博 反馈留言

	Chip-Scale Mass Manufacturable High-Q Silicon Microdisks
	Wang, Yujie[1]; Zhang, Nan[1]; Jiang, Zhiqiang[2]; Wang, Li[3]; Xiao, Yunfeng[3]; Sun, Wenzhao[1]; Yi, Ningbo[1]; Liu, Shuai[1]; Gu, Xiao[2]; Xiao, Shumin[1]
刊名	ADVANCED MATERIALS TECHNOLOGIES
	2017
卷号	2
关键词	high quality factor isotropic etching silicon microdisks standard photolithography
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2187152
专题	华南理工大学
作者单位	1.[1]Harbin Inst Technol, Shenzhen Grad Sch, Minist Ind & Informat Technol, Key Lab Micronano Optoelectron Informat Syst,Stat, Shenzhen 518055, Peoples R China 2.[2]Chongqing Univ, Dept Appl Phys, Chongqing 404100, Peoples R China 3.[3]Peking Univ, State Key Lab Mesoscop Phys, Beijing 100871, Peoples R China 4.[4]Peking Univ, Dept Phys, Beijing 100871, Peoples R China
推荐引用方式 GB/T 7714	Wang, Yujie[1],Zhang, Nan[1],Jiang, Zhiqiang[2],et al. Chip-Scale Mass Manufacturable High-Q Silicon Microdisks[J]. ADVANCED MATERIALS TECHNOLOGIES,2017,2.
APA	Wang, Yujie[1].,Zhang, Nan[1].,Jiang, Zhiqiang[2].,Wang, Li[3].,Xiao, Yunfeng[3].,...&Song, Qinghai[1].(2017).Chip-Scale Mass Manufacturable High-Q Silicon Microdisks.ADVANCED MATERIALS TECHNOLOGIES,2.
MLA	Wang, Yujie[1],et al."Chip-Scale Mass Manufacturable High-Q Silicon Microdisks".ADVANCED MATERIALS TECHNOLOGIES 2(2017).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。