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Band offset measurements in atomic-layer-deposited al2o3/zn0.8al0.2o heterojunction studied by x-ray photoelectron spectroscopy
Yan,Baojun1; Liu,Shulin1; Heng,Yuekun1; Yang,Yuzhen1,2; Yu,Yang1,3; Wen,Kaile1,4
刊名Nanoscale research letters
2017-05-19
卷号12期号:1
关键词Atomic layer deposition X-ray photoelectron spectroscopy Heterojunction Microchannel plate
ISSN号1931-7573
DOI10.1186/s11671-017-2131-8
通讯作者Yan,baojun(yanbj@ihep.ac.cn)
英文摘要Abstractpure aluminum oxide (al2o3) and zinc aluminum oxide (znxal1-xo) thin films were deposited by atomic layer deposition (ald). the microstructure and optical band gaps (eg) of the znxal1-xo (0.2?≤?x?≤?1) films were studied by x-ray diffractometer and tauc method. the band offsets and alignment of atomic-layer-deposited al2o3/zn0.8al0.2o heterojunction were investigated in detail using charge-corrected x-ray photoelectron spectroscopy. in this work, different methodologies were adopted to recover the actual position of the core levels in insulator materials which were easily affected by differential charging phenomena. valence band offset (δev) and conduction band offset (δec) for the interface of the al2o3/zn0.8al0.2o heterojunction have been constructed. an accurate value of δev?=?0.82?±?0.12?ev was obtained from various combinations of core levels of heterojunction with varied al2o3 thickness. given the experimental eg of 6.8?ev for al2o3 and 5.29?ev for zn0.8al0.2o, a type-i heterojunction with a δec of 0.69?±?0.12?ev was found. the precise determination of the band alignment of al2o3/zn0.8al0.2o heterojunction is of particular importance for gaining insight to the design of various electronic devices based on such heterointerface.
语种英语
出版者Springer US
WOS记录号BMC:10.1186/S11671-017-2131-8
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2175671
专题高能物理研究所
通讯作者Yan,Baojun
作者单位1.Institute of High Energy Physics of Chinese Academy of Sciences; State Key Laboratory of Particle Detection and Electronics
2.Nanjing University; Department of Physics
3.Xi’an University of Technology; School of Science
4.University of Chinese Academy of Sciences
推荐引用方式
GB/T 7714
Yan,Baojun,Liu,Shulin,Heng,Yuekun,et al. Band offset measurements in atomic-layer-deposited al2o3/zn0.8al0.2o heterojunction studied by x-ray photoelectron spectroscopy[J]. Nanoscale research letters,2017,12(1).
APA Yan,Baojun,Liu,Shulin,Heng,Yuekun,Yang,Yuzhen,Yu,Yang,&Wen,Kaile.(2017).Band offset measurements in atomic-layer-deposited al2o3/zn0.8al0.2o heterojunction studied by x-ray photoelectron spectroscopy.Nanoscale research letters,12(1).
MLA Yan,Baojun,et al."Band offset measurements in atomic-layer-deposited al2o3/zn0.8al0.2o heterojunction studied by x-ray photoelectron spectroscopy".Nanoscale research letters 12.1(2017).
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