Preparation of non-spherical silica composite abrasives by lanthanum ion-induced effect and its chemical-mechanical polishing properties on sapphire substrates | |
Dong, Yue[1]; Lei, Hong[2]; Liu, Wenqing[3]; Wang, Tianxian[4]; Xu, Lei[5] | |
刊名 | JOURNAL OF MATERIALS SCIENCE
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2018 | |
卷号 | 53页码:10732-10742 |
ISSN号 | 0022-2461 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2175428 |
专题 | 上海大学 |
作者单位 | 1.[1]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 2.Shanghai Univ, Res Ctr Nano Sci & Technol, Shanghai 200444, Peoples R China. 3.[2]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 4.Shanghai Univ, Res Ctr Nano Sci & Technol, Shanghai 200444, Peoples R China. 5.[3]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 6.[4]Shanghai Univ, Res Ctr Nano Sci & Technol, Shanghai 200444, Peoples R China. 7.[5]Shanghai Univ, Res Ctr Nano Sci & Technol, Shanghai 200444, Peoples R China. |
推荐引用方式 GB/T 7714 | Dong, Yue[1],Lei, Hong[2],Liu, Wenqing[3],et al. Preparation of non-spherical silica composite abrasives by lanthanum ion-induced effect and its chemical-mechanical polishing properties on sapphire substrates[J]. JOURNAL OF MATERIALS SCIENCE,2018,53:10732-10742. |
APA | Dong, Yue[1],Lei, Hong[2],Liu, Wenqing[3],Wang, Tianxian[4],&Xu, Lei[5].(2018).Preparation of non-spherical silica composite abrasives by lanthanum ion-induced effect and its chemical-mechanical polishing properties on sapphire substrates.JOURNAL OF MATERIALS SCIENCE,53,10732-10742. |
MLA | Dong, Yue[1],et al."Preparation of non-spherical silica composite abrasives by lanthanum ion-induced effect and its chemical-mechanical polishing properties on sapphire substrates".JOURNAL OF MATERIALS SCIENCE 53(2018):10732-10742. |
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