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	Low level birefringence detection system for stress measurement in semiconductors (EI收录)
	Peng, H.J.[1]; Wong, S.P.[1]; Liu, X.H.[1]; Lai, Y.W.[1]; Ho, H.P.[1]; Zhao, Shounan[2]
会议名称	Proceedings of SPIE - The International Society for Optical Engineering
会议日期	June 23, 2003 - June 26, 2003
会议地点	Munich, Germany
关键词	Angle measurement Light modulation Photoelasticity Semiconducting silicon
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2139838
专题	华南理工大学
作者单位	1.[1] Department of Electronic Engineering, Technology Research Centre, The Chinese University of Hong Kong, Shatin, N.T., Hong Kong 2.[2] Department of Applied Physics, South China University of Technology, Guangzhou, China
推荐引用方式 GB/T 7714	Peng, H.J.[1],Wong, S.P.[1],Liu, X.H.[1],等. Low level birefringence detection system for stress measurement in semiconductors (EI收录)[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. Munich, Germany. June 23, 2003 - June 26, 2003.

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