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	Tracking control of an electrostatic torsional micromirror beyond the pull-in limit with enhanced performance (EI收录)
	Sun, Weijie[1]; Yeow, John T. W.[2]; Sun, Zhendong[1]
会议名称	2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings
会议日期	August 29, 2012 - September 1, 2012
会议地点	Xi'an, China
关键词	Lyapunov functions Manufacture MEMS Nanotechnology
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2056766
专题	华南理工大学
作者单位	1.[1] College of Automation Science and Engineering, South China University of Technology, Wushan, Guangzhou 510640, China 2.[2] Advanced Micro/Nano Devices Lab., Systems Design Engineering, University of Waterloo, 200 University Ave. West, Waterloo, ON N2L 3G1, Canada
推荐引用方式 GB/T 7714	Sun, Weijie[1],Yeow, John T. W.[2],Sun, Zhendong[1]. Tracking control of an electrostatic torsional micromirror beyond the pull-in limit with enhanced performance (EI收录)[C]. 见:2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012 - Conference Proceedings. Xi'an, China. August 29, 2012 - September 1, 2012.

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