| Sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes (CPCI-S收录) | |
| Chen, Hui[1]; Pallapa, Manu[2]; Sun, Weijie[1]; Sun, Zhendong[1]; Yeow, John T. W.[2] | |
| 会议名称 | 2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO) |
| 关键词 | 2D torsional MEMS micromirror sidewall electrodes sliding mode control (SMC) |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2055487 |
| 专题 | 华南理工大学 |
| 作者单位 | 1.[1]South China Univ Technol, Coll Automat Sci & Engn, Guangzhou, Guangdong, Peoples R China 2.[2]Univ Waterloo, Syst Design Engn, Waterloo, ON N2L 3G1, Canada |
| 推荐引用方式 GB/T 7714 | Chen, Hui[1],Pallapa, Manu[2],Sun, Weijie[1],等. Sliding mode control of a 2D torsional MEMS micromirror with sidewall electrodes (CPCI-S收录)[C]. 见:2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO). |
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