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	Tracking Control of an Electrostatic Torsional Micromirror beyond the Pull-in Limit with Enhanced Performance (CPCI-S收录)
	Sun, Weijie[1]; Yeow, John T. W.[2]; Sun, Zhendong[1]
会议名称	2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO)
关键词	Output regulation MEMS nonlinear control
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2055467
专题	华南理工大学
作者单位	1.[1]South China Univ Technol, Coll Automat Sci & Engn, Guangzhou 510640, Peoples R China 2.[2]Univ Waterloo Univ Ave W, Adv Micro Nano Devices Lab, Syst Design Engn, Waterloo, ON N2L 3G1, Canada
推荐引用方式 GB/T 7714	Sun, Weijie[1],Yeow, John T. W.[2],Sun, Zhendong[1]. Tracking Control of an Electrostatic Torsional Micromirror beyond the Pull-in Limit with Enhanced Performance (CPCI-S收录)[C]. 见:2012 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO).

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