QQ客服 官方微博 反馈留言

	Application of twisting algorithm to a 2D electrostatic MEMS micromirror (EI收录)
	Chen, Hui[1]; Pallapa, Manu[2]; Sun, Weijie[1]; Sun, Zhendong[1]; Yeow, John T. W.[2]
会议名称	2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings
会议日期	August 26, 2013 - August 30, 2013
会议地点	Suzhou, China
关键词	Closed loop control systems Electrostatic actuators Electrostatics Manufacture Microelectromechanical devices Nanotechnology Sliding mode control Uncertainty analysis
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2051430
专题	华南理工大学
作者单位	1.[1] College of Automation Science and Engineering, South China University of Technology, Guangzhou, China 2.[2] Systems Design Engineering, University of Waterloo, Waterloo, Canada
推荐引用方式 GB/T 7714	Chen, Hui[1],Pallapa, Manu[2],Sun, Weijie[1],等. Application of twisting algorithm to a 2D electrostatic MEMS micromirror (EI收录)[C]. 见:2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2013 - Conference Proceedings. Suzhou, China. August 26, 2013 - August 30, 2013.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。