QQ客服 官方微博 反馈留言

	High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system (CPCI-S收录)
	Chen, H.[1]; Sun, W. J.[1]; Chen, A. I. H.[2]; Yeow, J. T. W.[2]; Sun, Z. D.[3]
会议名称	2014 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO)
关键词	MEMS micromirror sidewall electrodes adaptive algorithm SMC 2D image Laser scanning microscope
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2046355
专题	华南理工大学
作者单位	1.[1]South China Univ Technol, Coll Automat Sci & Engn, Guangzhou 510641, Guangdong, Peoples R China 2.[2]Univ Waterloo, Syst Design Engn, Waterloo, ON N2L 3G1, Canada 3.[3]Chinese Acad Sci, Acad Math & Syst Sci, Key Lab Syst & Control, Beijing 100190, Peoples R China
推荐引用方式 GB/T 7714	Chen, H.[1],Sun, W. J.[1],Chen, A. I. H.[2],等. High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system (CPCI-S收录)[C]. 见:2014 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO).

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。