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	High sensitive and linear pressure sensor for ultra-low pressure measurement (CPCI-S收录)
	Huang, Xian[1,2]; Zhang, Dacheng[2]
会议名称	28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014)
关键词	Pressure sensor high sensitive and linear ultra-low pressure peninsula-structured diaphragm finite element method
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2045618
专题	华南理工大学
作者单位	1.[1]Peking Univ, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China 2.[2]Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
推荐引用方式 GB/T 7714	Huang, Xian[1,2],Zhang, Dacheng[2]. High sensitive and linear pressure sensor for ultra-low pressure measurement (CPCI-S收录)[C]. 见:28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014).

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