Static Study of Cantilever Beam stiction under Electrostatic Force Influence

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	Static Study of Cantilever Beam stiction under Electrostatic Force Influence
	Zhang Y(张吟); Zhao YP(赵亚溥)
刊名	Acta Mechanica Solida Sinica
	2004
卷号	17 期号:2 页码:104-112
ISSN号	0894-9166
通讯作者	Zhang, Y (reprint author), Univ Connecticut, Dept Mech Engn, Storrs, CT 06268 USA.
中文摘要	The model and analysis of the cantilever beam adhesion problem under the action of electrostatic force are given. Owing to the nonlinearity of electrostatic force, the analytical solution for this kind of problem is not available. In this paper, a systematic method of generating polynomials which are the exact beamsolutions of the loads with different distributions is provided. The polynomials are used to approximate the beam displacement due to electrostatic force. The equilibrium equation offers an answer to how the beam deforms but no information about the unstuck length. The derivative of the functional with respect to the unstuck length offers such information. But to compute the functional it is necessary to know the beam deformation. So the problem is iteratively solved until the results are converged. Galerkin and Newton-Raphson methods are used to solve this nonlinear problem. The effects of dielectric layer thickness and electrostatic voltage on the cantilever beamstiction are studied.The method provided in this paper exhibits good convergence. For the adhesion problem of cantilever beam without electrostatic voltage, the analytical solution is available and is also exactly matched by the computational results given by the method presented in this paper.
学科主题	力学
类目[WOS]	Materials Science, Multidisciplinary ; Mechanics
研究领域[WOS]	Materials Science ; Mechanics
关键词[WOS]	MEMS ; ADHESION ; RESONATORS ; ACTUATORS ; CONTACT ; MODEL
收录类别	SCI
语种	英语
WOS记录号	WOS:000224279300002
公开日期	2007-06-15 ; 2007-12-05 ; 2009-06-23
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/17354]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Zhang Y,Zhao YP. Static Study of Cantilever Beam stiction under Electrostatic Force Influence[J]. Acta Mechanica Solida Sinica,2004,17(2):104-112.
APA	张吟,&赵亚溥.(2004).Static Study of Cantilever Beam stiction under Electrostatic Force Influence.Acta Mechanica Solida Sinica,17(2),104-112.
MLA	张吟,et al."Static Study of Cantilever Beam stiction under Electrostatic Force Influence".Acta Mechanica Solida Sinica 17.2(2004):104-112.