The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering | |
Ping Tang; Bing Li; Lianghuan Feng | |
刊名 | Ceramics International
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2018 | |
卷号 | Vol.44 No.4页码:4154-4157 |
关键词 | ZnO:Al films Magnetron sputtering Low substrate temperatures |
ISSN号 | 0272-8842 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/1910080 |
专题 | 四川大学 |
作者单位 | 1.College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China 2.a State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 610209, China |
推荐引用方式 GB/T 7714 | Ping Tang,Bing Li,Lianghuan Feng. The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering[J]. Ceramics International,2018,Vol.44 No.4:4154-4157. |
APA | Ping Tang,Bing Li,&Lianghuan Feng.(2018).The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering.Ceramics International,Vol.44 No.4,4154-4157. |
MLA | Ping Tang,et al."The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering".Ceramics International Vol.44 No.4(2018):4154-4157. |
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