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	The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering
	Ping Tang; Bing Li; Lianghuan Feng
刊名	Ceramics International
	2018
卷号	Vol.44 No.4页码:4154-4157
关键词	ZnO:Al films Magnetron sputtering Low substrate temperatures
ISSN号	0272-8842
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/1910080
专题	四川大学
作者单位	1.College of Materials Science and Engineering, Sichuan University, Chengdu 610064, China 2.a State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 610209, China
推荐引用方式 GB/T 7714	Ping Tang,Bing Li,Lianghuan Feng. The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering[J]. Ceramics International,2018,Vol.44 No.4:4154-4157.
APA	Ping Tang,Bing Li,&Lianghuan Feng.(2018).The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering.Ceramics International,Vol.44 No.4,4154-4157.
MLA	Ping Tang,et al."The optical and electrical properties of ZnO:Al thin films deposited at low temperatures by RF magnetron sputtering".Ceramics International Vol.44 No.4(2018):4154-4157.

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