Characterization of Zn2SnO4 Thin Films Prepared by RF Magnetron Sputtering | |
Tang, Tian Yu; Ren, Sheng Qiang; Liu, Yuan; Zhang, Jing Quan; Liu, Cai; Wu, Li Li; Wang, Wen Wu; Li, Wei; Feng, Liang Huan | |
刊名 | RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY B
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2018 | |
卷号 | Vol.12 No.3页码:503-509 |
关键词 | Zn2SnO4 ceramic target RF magnetron sputtering oxygen content annealing |
ISSN号 | 1990-7931 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/1869740 |
专题 | 四川大学 |
作者单位 | Sichuan Univ, Coll Mat Sci & Engn, Chengdu 610064, Sichuan, Peoples R China |
推荐引用方式 GB/T 7714 | Tang, Tian Yu,Ren, Sheng Qiang,Liu, Yuan,et al. Characterization of Zn2SnO4 Thin Films Prepared by RF Magnetron Sputtering[J]. RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY B,2018,Vol.12 No.3:503-509. |
APA | Tang, Tian Yu.,Ren, Sheng Qiang.,Liu, Yuan.,Zhang, Jing Quan.,Liu, Cai.,...&Feng, Liang Huan.(2018).Characterization of Zn2SnO4 Thin Films Prepared by RF Magnetron Sputtering.RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY B,Vol.12 No.3,503-509. |
MLA | Tang, Tian Yu,et al."Characterization of Zn2SnO4 Thin Films Prepared by RF Magnetron Sputtering".RUSSIAN JOURNAL OF PHYSICAL CHEMISTRY B Vol.12 No.3(2018):503-509. |
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