Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology

doi:10.1016/j.ceramint.2018.08.159

	Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology
	Lin, Lin 1,2; Ma, Mingsheng 1; Zhang, Faqiang 1; Liu, Feng 1; Liu, Zhifu 1; Li, Yongxiang 1,3
刊名	Ceramics International
	2018
ISSN号	02728842
DOI	10.1016/j.ceramint.2018.08.159
英文摘要	This paper presents a kind of passive wireless pressure and temperature integrated inductor-capacitor (LC) resonant sensor based on low temperature co-fired ceramic (LTCC) technology. The pressure sensing part is dependent on a traditional cavity capacitor. The temperature sensing part is composed of an interdigital capacitor and a planar spiral inductor. The capacitance and the resistance of inductor coil would change as a response to temperature. The LTCC material with a low Young's modulus of ~65 GPa prepared by our laboratory was used to obtain high pressure sensitivity. The experimental results showed that the prepared sensor has a pressure sensitivity of 1.16 kHz/kPa, and a temperature sensitivity of 0.062% dB/°C within the range of 140–850 kPa, 50–500 °C, respectively. © 2018
出版者	Elsevier Ltd
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/25279]
专题	中国科学院上海硅酸盐研究所
作者单位	1.CAS Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, 1295 Dingxi Road, Shanghai; 200050, China; 2.University of Chinese Academy of Sciences, Beijing; 100049, China; 3.School of Engineering, RMIT University, Melbourne; VIC; 3001, Australia
推荐引用方式 GB/T 7714	Lin, Lin,Ma, Mingsheng,Zhang, Faqiang,et al. Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology[J]. Ceramics International,2018.
APA	Lin, Lin,Ma, Mingsheng,Zhang, Faqiang,Liu, Feng,Liu, Zhifu,&Li, Yongxiang.(2018).Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology.Ceramics International.
MLA	Lin, Lin,et al."Integrated passive wireless pressure and temperature dual-parameter sensor based on LTCC technology".Ceramics International (2018).