Microhole drilling in TiC ceramic with a femtosecond pulsed laser

	Microhole drilling in TiC ceramic with a femtosecond pulsed laser
	Zhang, J.Z.1; Liu, Y.S.2; Wang, Y.Q.1; Zhang, Y.1; Yang, X.J.3
刊名	Lasers in Engineering
	2018
卷号	41 期号:4-6 页码:359-371
ISSN号	08981507
英文摘要	A femtosecond (fs) pulsed laser was employed to drill microholes in TiC ceramic. The Morphologies of microholes drilled at different assisted gas pressures and laser feeding speeds were investigated. Chemical compositions and chemical bonds of laser treated debris and untreated specimen were analysed. The mechanism of interaction between the femtosecond laser and the TiC ceramic was discussed. The results indicated that the assisted gas pressure had a greater effect on the morphologies of microholes, compared with the feeding speed. The entrance diameter of microholes was smaller than the exit diameter. The entrance roundness was more perfect than the exit roundness, and the entrance roundness decreased slightly with increasing gas pressure and feeding speed. Higher feeding speed was unfavourable to the morphologies of microholes. Ti, C and O were detected in laser treated debris. X-ray photoelectron spectroscopy (XPS) investigation showed that the C-Ti bond was broken and Ti2O3 and TiO2 were formed during drilling. © 2018 Old City Publishing, Inc.
出版者	Old City Publishing, 628 North 2nd Street, Philadelphia, PA 19123, United States
内容类型	期刊论文
源URL	[http://ir.sic.ac.cn/handle/331005/25275]
专题	中国科学院上海硅酸盐研究所
作者单位	1.College of Materials and Mineral Resources, Xi'an University of Architecture and Technology, Xi'an, Shaanxi Province; 710055, China; 2.State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi'an, Shaanxi Province; 710072, China; 3.State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an, Shaanxi Province; 710119, China
推荐引用方式 GB/T 7714	Zhang, J.Z.,Liu, Y.S.,Wang, Y.Q.,et al. Microhole drilling in TiC ceramic with a femtosecond pulsed laser[J]. Lasers in Engineering,2018,41(4-6):359-371.
APA	Zhang, J.Z.,Liu, Y.S.,Wang, Y.Q.,Zhang, Y.,&Yang, X.J..(2018).Microhole drilling in TiC ceramic with a femtosecond pulsed laser.Lasers in Engineering,41(4-6),359-371.
MLA	Zhang, J.Z.,et al."Microhole drilling in TiC ceramic with a femtosecond pulsed laser".Lasers in Engineering 41.4-6(2018):359-371.