Direct formation of wafer-scale single-layer graphene films on the rough surface substrate by PECVD

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	Direct formation of wafer-scale single-layer graphene films on the rough surface substrate by PECVD
	Guo, Liangchao; Lin, Cheng-Te; Zhang, Zhenyu; Sun, Hongyan; Dai, Dan; Cui, Junfeng; Li, Mingzheng; Xu, Yang; Xu, Mingsheng; Du, Yuefeng
刊名	CARBON
	2018
卷号	129 页码:456-461
关键词	Chemical-vapor-deposition High-quality Raman-spectroscopy Monolayer Graphene Bilayer Graphene Direct Growth Carbon Graphite Copper Cvd
英文摘要	The technical advance of plasma enhanced chemical vapor deposition (PECVD) exhibits the potential to grow large-area high-quality graphene films at relatively low growth temperature, which is beneficial to the fabrication of graphene-based electronic devices/sensors and transparent electrode. However, it remains a challenge to overcome the degradation of graphene quality during growth by PECVD, due to the continuous bombardment of plasma ions on the catalyst surface. Herein, the combined techniques of PECVD and the growth of graphene underneath the catalyst layer were proposed. As a result, transfer-free single-layer graphene films with 2.5 inch in diameter on quartz substrate can be obtained with the growth temperature of 700 degrees C, which is 250 degrees C lower than that for graphene synthesis using thermal CVD. The graphene films prepared by our method show the ability to form on the rough surfaces with millimeter-scale grooves and have minimal surface contamination, compared to that of conventionally transferred CVD graphene. (C) 2017 Elsevier Ltd. All rights reserved.
学科主题	Chemistry ; Materials Science
语种	英语
公开日期	2018-12-04
内容类型	期刊论文
源URL	[http://ir.nimte.ac.cn/handle/174433/16736]
专题	2018专题
推荐引用方式 GB/T 7714	Guo, Liangchao,Lin, Cheng-Te,Zhang, Zhenyu,et al. Direct formation of wafer-scale single-layer graphene films on the rough surface substrate by PECVD[J]. CARBON,2018,129:456-461.
APA	Guo, Liangchao.,Lin, Cheng-Te.,Zhang, Zhenyu.,Sun, Hongyan.,Dai, Dan.,...&Huang, Feng.(2018).Direct formation of wafer-scale single-layer graphene films on the rough surface substrate by PECVD.CARBON,129,456-461.
MLA	Guo, Liangchao,et al."Direct formation of wafer-scale single-layer graphene films on the rough surface substrate by PECVD".CARBON 129(2018):456-461.