MEMS-based filter integrating tunable Fabry–Perot cavity and grating

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 自适应光学技术研究室（八室）

	MEMS-based filter integrating tunable Fabry–Perot cavity and grating
	Shi, Zhendong 1; Fang, Liang 2; Zhong, Libo 2
刊名	Optics Communications
	2017
卷号	402 页码:472-477
关键词	Bandpass filters - Diffraction gratings - Electrostatic actuators - Microelectromechanical devices - Optical filters
ISSN号	0030-4018
英文摘要	We present a novel Micro-Electro-Mechanical-Systems (MEMS) filter integrating a tunable Fabry–Perot cavity and a grating (FP-G). It fuses the functions of the Fabry–Perot (FP) cavity and grating into a single device so as to realize both narrow spectral linewidth given by FP cavity and wide spectral range given by grating. A MEMS FP-G filter with 200μm cavity length was designed and fabricated. It is based on a W-shaped-section micro-bridge structure by which the electrostatic actuator is independent on the FP cavity and a long cavity length can be configured. A grating etched in the back of a cavity mirror serves to spatially separate the transmitted spectral lines corresponding to different interference orders of FP cavity. Experimental results indicated that the MEMS FP-G filter obtained a broader operation spectral range compared with the traditional MEMS FP filter, and achieved 1.2 nm spectral linewidth, which could be narrower by improving the effective finesse of the FP cavity in the fabrication process. Compared with the simulation results, there was considerable room for improvement in device performance by the optimal technique. © 2017 Elsevier B.V.
语种	英语
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8860]
专题	光电技术研究所_自适应光学技术研究室（八室）
作者单位	1.Southwest Institute of Technical Physics, Chengdu; 610041, China; 2.Institute of Optics and Electronics, Chinese Academy of Science, Chengdu; 610209, China
推荐引用方式 GB/T 7714	Shi, Zhendong,Fang, Liang,Zhong, Libo. MEMS-based filter integrating tunable Fabry–Perot cavity and grating[J]. Optics Communications,2017,402:472-477.
APA	Shi, Zhendong,Fang, Liang,&Zhong, Libo.(2017).MEMS-based filter integrating tunable Fabry–Perot cavity and grating.Optics Communications,402,472-477.
MLA	Shi, Zhendong,et al."MEMS-based filter integrating tunable Fabry–Perot cavity and grating".Optics Communications 402(2017):472-477.