Modified surface testing method for large convex aspheric surfaces based on diffraction optics

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Modified surface testing method for large convex aspheric surfaces based on diffraction optics
	Zhang, H. D.; X. K. Wang; D. L. Xue and X. J. Zhang
刊名	Applied Optics
	2017
卷号	56 期号:34
英文摘要	Large convex aspheric optical elements have been widely applied in advanced optical systems, which have presented a challenging metrology problem. Conventional testing methods cannot satisfy the demand gradually with the change of definition of "large." A modified method is proposed in this paper, which utilizes a relatively small computer-generated hologram and an illumination lens with certain feasibility to measure the large convex aspherics. Two example systems are designed to demonstrate the applicability, and also, the sensitivity of this configuration is analyzed, which proves the accuracy of the configuration can be better than 6 nm with careful alignment and calibration of the illumination lens in advance. Design examples and analysis show that this configuration is applicable to measure the large convex aspheric surfaces. (C) 2017 Optical Society of America
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/59423]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhang, H. D.,X. K. Wang,D. L. Xue and X. J. Zhang. Modified surface testing method for large convex aspheric surfaces based on diffraction optics[J]. Applied Optics,2017,56(34).
APA	Zhang, H. D.,X. K. Wang,&D. L. Xue and X. J. Zhang.(2017).Modified surface testing method for large convex aspheric surfaces based on diffraction optics.Applied Optics,56(34).
MLA	Zhang, H. D.,et al."Modified surface testing method for large convex aspheric surfaces based on diffraction optics".Applied Optics 56.34(2017).