Weighted iterative algorithm for beam alignment in scanning beam interference lithography

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Weighted iterative algorithm for beam alignment in scanning beam interference lithography
	Song, Y.; W. Wang; S. Jiang; Bayanheshig and N. Zhang
刊名	Applied Optics
	2017
卷号	56 期号:31
英文摘要	To obtain low phase errors and good interference fringe contrast, an automated beam alignment system is used in scanning beam interference lithography. In the original iterative algorithm, if the initial beam deviation is large or the optical parameters are inappropriate, the beam angle (or position) overshoot may exceed the detector's range. To solve this problem, a weighted iterative algorithm is proposed in which the beam angle and position overshoots can be suppressed by adjusting the weighting coefficients. The original iterative algorithm is introduced. The weighted iterative algorithm is then presented and its convergence is analyzed. Simulation and experimental results show that the proposed weighted iterative algorithm can reduce the beam angle and position overshoots at the expense of convergence speed, avoiding the alignment failure caused by exceeding the detector's range. Besides, the original and weighted iterative algorithms can be combined to optimize the iteration. (C) 2017 Optical Society of America
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/59196]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Song, Y.,W. Wang,S. Jiang,et al. Weighted iterative algorithm for beam alignment in scanning beam interference lithography[J]. Applied Optics,2017,56(31).
APA	Song, Y.,W. Wang,S. Jiang,&Bayanheshig and N. Zhang.(2017).Weighted iterative algorithm for beam alignment in scanning beam interference lithography.Applied Optics,56(31).
MLA	Song, Y.,et al."Weighted iterative algorithm for beam alignment in scanning beam interference lithography".Applied Optics 56.31(2017).