Precision drive and position control of non-resonance piezoelectric stack linear motor

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所 > 中科院长春光机所知识产出

	Precision drive and position control of non-resonance piezoelectric stack linear motor
	Cao, X.-T.; D.-Q. Li; H.-W. Li; G.-Y. Lin and W.-F. Yang
刊名	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
	2017
卷号	25 期号:8
英文摘要	In order to realize long stroke and high precision displacement control in scopes such as optical-mechanical structure, integrated circuit and so on, a precision hybrid amplification driving circuit was designed by using non-resonance piezoelectric inchworm stack linear motor based on the high voltage power operational amplifier. Resolution and amplitude-frequency characteristic of driving circuit were verified by Bode diagram gotten by theoretical analysis and experiment. Taking FPGA as core processor and grating ruler as feedback element, through analyzing various operation modes of non-resonant piezoelectric linear motor, according to the operation sequence of linear motor, a control strategy combining the open loop large range whole step mode with closed-loop and small-range single step operation mode was designed and finished. Two types of control algorithms of PID and compound control of combination between PID and feed forward of hysteresis inverse model of piezoelectric ceramic were designed respectively in single step operation mode. Experimental results indicate that the control strategy can realize precise displacement control. Compound control algorithm has more superior control effect than PID. Moreover, its closed-loop position control precision can reach 1.5 nm in large stroke of 21 mm. Linear motor can realize maximum driving force of 300N and satisfies application demands of high-precision displacement control in large stroke. 2017, Science Press. All right reserved.
语种	中文
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/58838]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Cao, X.-T.,D.-Q. Li,H.-W. Li,et al. Precision drive and position control of non-resonance piezoelectric stack linear motor[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(8).
APA	Cao, X.-T.,D.-Q. Li,H.-W. Li,&G.-Y. Lin and W.-F. Yang.(2017).Precision drive and position control of non-resonance piezoelectric stack linear motor.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(8).
MLA	Cao, X.-T.,et al."Precision drive and position control of non-resonance piezoelectric stack linear motor".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.8(2017).