Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry | |
Huang, L; Xue, JP; Gao, B; Zuo, C; Idir, M | |
刊名 | APPLIED OPTICS |
2017 | |
卷号 | 56期号:18页码:5139-5144 |
关键词 | Least-squares Integration Stereo Deflectometry Gradient Data Calibration Improvement Spline Shape |
ISSN号 | 1559-128X |
DOI | 10.1364/AO.56.005139 |
文献子类 | 期刊论文 |
英文摘要 | There are wide applications for zonal reconstruction methods in slope-based metrology due to its good capability of reconstructing the local details on surface profile. It was noticed in the literature that large reconstruction errors occur when using zonal reconstruction methods designed for rectangular geometry to process slopes in a quadrilateral geometry, which is a more general geometry with phase measuring deflectometry. In this work, we present a new idea for the zonal methods for quadrilateral geometry. Instead of employing the intermediate slopes to set up height-slope equations, we consider the height increment as a more general connector to establish the height-slope relations for least-squares regression. The classical zonal methods and interpolation-assisted zonal methods are compared with our proposal. Results of both simulation and experiment demonstrate the effectiveness of the proposed idea. In implementation, the modification on the classical zonal methods is addressed. The new methods preserve many good aspects of the classical ones, such as the ability to handle a large incomplete slope dataset in an arbitrary aperture, and the low computational complexity comparable with the classical zonal method. Of course, the accuracy of the new methods is much higher when integrating the slopes in quadrilateral geometry. (c) 2017 Optical Society of America |
WOS关键词 | LEAST-SQUARES INTEGRATION ; STEREO DEFLECTOMETRY ; GRADIENT DATA ; CALIBRATION ; IMPROVEMENT ; SPLINE ; SHAPE |
语种 | 英语 |
WOS记录号 | WOS:000403821500005 |
内容类型 | 期刊论文 |
源URL | [http://ir.sinap.ac.cn/handle/331007/28898] |
专题 | 上海应用物理研究所_中科院上海应用物理研究所2011-2017年 |
推荐引用方式 GB/T 7714 | Huang, L,Xue, JP,Gao, B,et al. Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry[J]. APPLIED OPTICS,2017,56(18):5139-5144. |
APA | Huang, L,Xue, JP,Gao, B,Zuo, C,&Idir, M.(2017).Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry.APPLIED OPTICS,56(18),5139-5144. |
MLA | Huang, L,et al."Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry".APPLIED OPTICS 56.18(2017):5139-5144. |
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