Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators

CORC > 力学研究所 > 中国科学院力学研究所 > 力学所知识产出(1956-2008)

	Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators
	Guo JG(郭建刚); Zhao YP(赵亚溥)
刊名	Journal of Microelectromechanical Systems
	2004
通讯作者邮箱	yzhao@lnm.imech.ac.cn
卷号	13 期号:6 页码:1027-1035
ISSN号	1057-7157
通讯作者	Guo, JG (reprint author), Chinese Acad Sci, Inst Mech, State Key LNM, Beijing 100080, Peoples R China.
中文摘要	The influence of van der Waals (vdW) and Casimir forces on the stability of the electrostatic torsional nanoelectromechanical systems (NEMS) actuators is analyzed in the paper. With the consideration of vdW and Casimir effects, the dependence of the critical tilting angle and pull-in voltage on the sizes of structure is investigated. And the influence of vdW torque is compared with that of Casimir torque. The modified coefficients of vdW and Casimir torques on the pull-in voltage are, respectively, calculated. When the gap is sufficiently small, pull-in can still take place with arbitrary small angle perturbation because of the action of vdW and Casimir torques even if there is not electrostatic torque. And the critical pull-in gaps for two cases are, respectively, derived.
学科主题	力学
类目[WOS]	Engineering, Electrical & Electronic ; Engineering, Mechanical
研究领域[WOS]	Engineering
关键词[WOS]	PULL-IN ; DYNAMIC-BEHAVIOR ; MEMS ; MODEL ; MICROMIRRORS ; SWITCH
收录类别	SCI ; EI
语种	英语
WOS记录号	WOS:000225515100017
公开日期	2007-06-15 ; 2007-12-05 ; 2009-06-23
内容类型	期刊论文
源URL	[http://dspace.imech.ac.cn/handle/311007/17103]
专题	力学研究所_力学所知识产出(1956-2008)
推荐引用方式 GB/T 7714	Guo JG,Zhao YP. Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators[J]. Journal of Microelectromechanical Systems,2004,13(6):1027-1035.
APA	郭建刚,&赵亚溥.(2004).Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators.Journal of Microelectromechanical Systems,13(6),1027-1035.
MLA	郭建刚,et al."Influence of van der Waals and Casimir Forces on Electrostatic Torsional Actuators".Journal of Microelectromechanical Systems 13.6(2004):1027-1035.