Etching-Controlled Growth of Graphene by Chemical Vapor Deposition

	Etching-Controlled Growth of Graphene by Chemical Vapor Deposition
	Luo, Birong 1; Gao, Enlai 2,3; Geng, Dechao 1; Wang, Huaping 1; Xu, Zhiping 2,3; Yu, Gui 1,4
刊名	CHEMISTRY OF MATERIALS
	2017-02-14
卷号	29 期号:3 页码:1022-1027
英文摘要	Graphene growth and etching are reciprocal processes that can reach a dynamic balance during chemical vapor deposition (CVD). Most commonly, the growth of graphene is the dominate process, while the etching of graphene is a recessive process often neglected during CVD growth of graphene. We show here that through the rational design of low-pressure CVD of graphene in hydrogen diluted methane and regulation of the flow rate of H-2, the etching effect during the growth process of graphene could be prominent and even shows macroscopic selectivity. On this basis, etching-controlled growth and synthesis of graphene with various morphologies from compact to dendritic even to fragmentary have been demonstrated. The morphology selection mechanism is clarified through phase-field theory based on simulations. This study not only presents an intriguing case for the fundamental mechanism of CVD growth but also provides a facile method for the synthesis of high-quality graphene with trimmed morphologies.
语种	英语
内容类型	期刊论文
源URL	[http://ir.iccas.ac.cn/handle/121111/38174]
专题	化学研究所_有机固体实验室
作者单位	1.Chinese Acad Sci, Inst Chem, Beijing Natl Lab Mol Sci, Beijing 100190, Peoples R China 2.Tsinghua Univ, Appl Mech Lab, Dept Engn Mech, Beijing 100084, Peoples R China 3.Tsinghua Univ, Ctr Nano & Micro Mech, Beijing 100084, Peoples R China 4.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
推荐引用方式 GB/T 7714	Luo, Birong,Gao, Enlai,Geng, Dechao,et al. Etching-Controlled Growth of Graphene by Chemical Vapor Deposition[J]. CHEMISTRY OF MATERIALS,2017,29(3):1022-1027.
APA	Luo, Birong,Gao, Enlai,Geng, Dechao,Wang, Huaping,Xu, Zhiping,&Yu, Gui.(2017).Etching-Controlled Growth of Graphene by Chemical Vapor Deposition.CHEMISTRY OF MATERIALS,29(3),1022-1027.
MLA	Luo, Birong,et al."Etching-Controlled Growth of Graphene by Chemical Vapor Deposition".CHEMISTRY OF MATERIALS 29.3(2017):1022-1027.