Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method | |
Zong, Ke1; Zeng, Xuan1; Ji, Xia2; Cai, Wei3 | |
刊名 | JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS |
2009-07-01 | |
卷号 | 8期号:3页码:13 |
关键词 | lithography simulation phase-shifting mask spectral method eigen oscillations discontinuous Galerkin method Schwarz domain decomposition iteration |
ISSN号 | 1537-1646 |
DOI | 10.1117/1.3158611 |
英文摘要 | We apply a newly developed parallel generalized eigen-oscillation spectral element method (GeSEM) for rigorous simulations of 2-D phase-shift masks (PSMs). The GeSEM combines highly parallel Schwarz-domain decomposition iterations and an eigen-oscillation-based spectral method to model high-frequency oscillatory electromagnetic fields in PSMs with dispersive chrome materials in the PSMs. The performance of the GeSEM has been compared to the popular plane wave-based waveguide method for 2-D masks. The numerical results have clearly demonstrated the GeSEM's advantages in modeling the effects of nonperiodic structures such as optical images near mask edges, and its speedup through parallel implementations, which makes the simulation of a large-scale mask possible in whole-chip mask modeling. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3158611] |
资助项目 | National Basic Research Program of China[2005CB321701] ; National Major Science and Technology[2008ZX01035-001-06] ; National Major Science and Technology[2009ZX020234-3] ; NSFC[60676018] ; NSFC[60806013] ; Ministry of Education of China[200802460068] ; International Science and Technology Cooperation program foundation of Shanghai[08510700100] ; Outstanding Academic Leader of Shanghai ; DARPA[W911NF-05-2-0053] ; State Key laboratory of Scientific and Engineering Computing ; Chinese Academy of Sciences ; U. S. Department of Energy[DEFG0205ER25678] |
WOS研究方向 | Engineering ; Science & Technology - Other Topics ; Materials Science ; Optics |
语种 | 英语 |
出版者 | SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS |
WOS记录号 | WOS:000270881800014 |
内容类型 | 期刊论文 |
源URL | [http://ir.amss.ac.cn/handle/2S8OKBNM/7512] |
专题 | 中国科学院数学与系统科学研究院 |
通讯作者 | Zong, Ke |
作者单位 | 1.Fudan Univ, State Key Lab ASIC & Syst, Microelect Dept, Shanghai 201203, Peoples R China 2.Chinese Acad Sci, Inst Computat Math, Beijing 100190, Peoples R China 3.Univ N Carolina, Dept Math & Stat, Charlotte, NC 28223 USA |
推荐引用方式 GB/T 7714 | Zong, Ke,Zeng, Xuan,Ji, Xia,et al. Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method[J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS,2009,8(3):13. |
APA | Zong, Ke,Zeng, Xuan,Ji, Xia,&Cai, Wei.(2009).Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method.JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS,8(3),13. |
MLA | Zong, Ke,et al."Highly parallel rigorous simulations of phase-shift masks with a generalized eigen-oscillation spectral element method".JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 8.3(2009):13. |
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